 3염화 실란(Trichlorosilane)는 다결정 실리콘, 단결정 실리콘 원료, 에피 택셜 성장(epitaxial growth) , 실리콘 액체, 실리콘 오일, 화학 증착, 실리콘 화합물 제조, 전자 가스 제조에 사용됩니다.
SPECIFICATION
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Product Name:Trichlorosilane(TCS)
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CAS number:10025-78-2
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Product Standard: GB/T 20434-2006 (Made in China)
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High-boiling (wt%) < 0.001
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Content of HCL (wt%) ≤0.01
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Content of SiHCl3 (wt%) ≥ 99.99
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(CH3)2SiHCL ppmwt ≤ 300
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Content of SiH2Cl2 (wt%) ≤ 0.01
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CH3SiHCL2 ppmwt ≤ 200
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Content of SiCl4 (wt%) ≤0.01
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CH3SiCL3 ppmwt ≤ 200
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B ppba ≤ 100
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i-C5H12 ppmwt ≤ 200
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Ni ppbwt ≤ 10
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Cr ppbwt ≤ 10
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Al ppbwt ≤ 10
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Fe ppbwt ≤ 10
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P ppbwt ≤ 10
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Properties and Uses：
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We have used advanced technology to precondition ordinary
silicon tetrachloride and then remove the metal ions and the C-H
bond-containing substances in raw material through rectification and
molecular sieve adsorption. The purity of silicon tetrachloride can reach 9N
or above, which can fully meet the needs to produce optical fiber preform.
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Package：ISO TANK
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